This fully automated in-line inspection system consists of a high speed line scan camera, a custom telecentric lens for zero distortion of the image, and ultra-bright LED line lights with cutoff in the UV range to avoid photo-bleaching of sensitive biochemistry. The line-scan camera is being triggered by a high-precision linear encoder with 0.1µm step resolution. The system can be configured for any number of biochip sizes, and is suitable for scanning micro-spotted arrays, bar codes and other substrates. The biochip inspection system can scan up to 150mm/sec depending on substrates. Features can be measured down to +/- 2µm repeatedly. Advanced image processing, analysis and reporting features are provided as part of the Windows-PC based control software. moviMED., www.movimed.com
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